Semiconductor Ozone Solutions LLC provides a retrofit replacement solution for the Phasor II Membrane Contactor.
The Entegris Phasor II is a Membrane contactor utilizing pressure differential and surface area of PTFE membrane materials to infuse ozone into DI water. For recirculated DIO3 applications the membrane contactor creates reasonable infusion performance over time. These units are sensitive to pressure variations in DI water. To perform correctly the DI water and Ozone gas pressures must be properly balanced and stable.
Challenges with this membrane contactor are related to the potential for an improper pressure differential to produce ozone bubbles in the DIO3. Ozone bubbles in contact with hydrophobic surfaces causes defects on the silicon surfaces. In addition, if the pressure differential of DI water goes too high with respect to the ozone gas pressure, then damage to the membrane material will result. When the membrane is over pressurized with DI water the hydrophobic membrane can tear or become wetted. When this happens the contactor begins to allow DI water to pass into the ozone gas supply. This can cause damage to the process due to low levels of ozone in the DIO3. In extreme cases the DI water can travel upstream to the ozone generator and damage the ozone delivery system.
Entegris has discontinued manufacturing of this product but SOS has produced an alternative which can be retrofitted in place of these contactors.