SOS Chemical Injected DIO3 Delivery System

SOS has developed a versatile DIO3 delivery system that offers flexible configurations, including single or dual chemical injection and single-pass or recirculated delivery to your point of use. By using ozone instead of hydrogen peroxide as your oxidizer, in combination with other chemistries, you can significantly reduce the cost per pattern for a variety of cleaning and etching applications on single-wafer systems.

Ozone has traditionally faced challenges with etch stability due to fluctuations in ozone concentration between recirculated and spray process conditions. SOS has overcome these issues, ensuring that ozone concentration remains stable at less than 1 PPM, whether the system is in spray or recirculation mode.

Our advanced infusion technology eliminates the latency and inertia often associated with DIO3 ozone concentration control systems. With our enhanced controls and capabilities, you can lower your cost per pattern without compromising process cleanliness or etch stability. Additionally, our systems help reduce chemical usage, disposal costs, and water consumption, making them a more sustainable and cost-effective solution.