MKS Liquozone XF or 100

SOS offers a wide variety of used equipment. We install, test and refurbish these systems to ensure trouble free operation for many years to come. We also offer the installation and technical support to properly install and integrate the systems to your existing wet process systems. The MKS Liquozone 100 system shown below is capable of 5 to 90 PPM at flow rates from 5-60 LPM. This unit is S2 and CE compliant. SOS will provide all manuals and integration documentation required.

PPM Performance

Experience reliable ozone solutions with MKS Liquozone XF or 100. Semiconductor Ozone Solutions delivers cutting-edge technology for your needs.

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