In-Tank Chemical Agitation
Localized agitation or infusion is sometimes helpful to maintain a properly mixed solution by stiring the tank contents or boosting the levels of infused gases in the solution. Agitation in close proximity to the wafers can also create a mechanical abrasion affect that can help strip photo-resist from the wafer surface or increase the ozone PPM levels at the wafer during high flow rinse cycles.
By matching the right materials for your specified process application this in tank infuser can produce a wide variety of process benefits. These units can be utilized to simply agitate the tank, inject HCL gas, Nitrogen, CO2 or even locally infuse Ozone.
Tell us your application need and we will provide the right infuser to produce the desired effect. All agitation products are available in Natural Poly, PVDF/Kynar, Halar, PTFE with Teflon Membranes.
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