The high purity wetted materials in the OG-5000 series, combined with an innovative cell design, unique sealing technique and a state of the art controller ensures the production of high purity and very high concentration ozone gas to meet the demanding requirements of all applications in the Semiconductor Industry.
- Designed for high concentrations and high flow rates (over 250g/Nm3)
- Water Cooled Generator
- High Purity silent corona discharge
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