SOS has a large stock of both Submicron Systems and Akrion Systems spare parts for Rear Mount and Gama wet stations.

SOS can guarantee these parts as fully operational and tested. The parts which come into contact with process chemical have been hard cleaned by a mixture of HCL and DIO3. We guarantee all impurities, particulate and ionic have been removed and the components flushed with 18 Meg ohm DI water. The components are cleaned and packaged in a class 1000 cleanroom.