IN USA OG-5000 Custom Ozone Delivery Systems
For new installations and/or existing wet process tools requiring ozone for DIO3, SOM or surface conversion rinse tanks our ozone generation cabinets are essential. SOS provides value by producing the right combination of supply gas blending, ozone generation, flow controls all integrated with the right containment, safety monitoring at the right cost for your specific needs. Providing secondary containment solutions with exhausted cabinets and ozone leak detection are often necessary but are not always required. Given the various needs of your process application and installation many ozone generation systems can cost as little as $54,000 or approach $157,000. In addition the generator electronic controls can be highly sophisticated, simplified or even eliminated in some laboratory situations.