CO2 Injection System

CO2 Infusion System

This SOS infusion system provides everything you need to integrate CO2 injection onto a:

  • FSI Mercury Spray Processor
  • SEZ Single Wafer Spin Processor
  • TEL Clean Track Act 8 Single Wafer Processor
  • Immersion Wet Station Rinse Tank

The system contains:

  • Injection System Cabinet with all facility connections Integral 14” In-Line Infuser
  • DI and CO2 Supply Pressure Regulation
  • CO2 Flow Control Valve
  • Directional and Pressure Protection Hardware
  • CO2 and DI Pressure Gauges
  • Installation Instructions
  • Documentation for BOM Spare Parts
  • Plumbing & Electrical Schematics

When used on SEZ, TEL or other single wafer processors as well as on FSI Mercury spray tools the CO2 injection system effectivly eliminates wafer surface charging. When used on spray or spin tools the CO2 injection system can control CO2 levels by using either DI Resistivity or Conductivity sensor inputs.  All single wafer spin and batch spray processors build wafer surface charges during rinse cycles. This charge buildup is due to the non-conductive nature of DI water. By injecting CO2 into the rinse water supply stream the surface charges are eliminated improving cleaning efficiency, device performance and wafer yield. CO2 is a completely inert gas providing a means to re-ionize the DI water in a neutral fashion thus eliminating the effect of the fluid flow building charge across the wafer surface.

CO2 Infusion System

SOS Infusion System

GUI Main Screen

Amine based Resist stripper solutions can also be rinsed with DI water but the corrosion of exposed Aluminum traces or pads can become a serious problem. This is primarily caused by the reaction of the amine based solutions with DI water. When combined the amines become caustic driving up PH levels causing the damage.

Corrosion On Al Pads

However this pitting and corrosion of the lands and pads can be eliminated through the proper use of CO2 injection prior to and during the DI water rinse steps. By employing the proper utilization of CO2 gas large PH swings from the reaction can be effectively countered in a way that actually helps promote the effective rinsing of the residual stripper. Typical rinse times of five to ten minutes provide adequate rinsing providing a more environmentally friendly and cost effective rinse process.

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